LGA THIN FILMS
VACUUM DEPOSITION SPECIALISTS
3064 Lawrence Expressway, Santa Clara, CA 95051
(408)733-3076    info@lgathinfilms.com


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Processes/Services



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We supply vacuum thin film deposition services on customer-supplied substrates by sputtering or evaporation for R&D and production.

Our clean rooms house 5 sputtering systems with load locks and an e-gun evaporation system with a 4-pocket hearth.

Sputter coating is performed in Perkin/Elmer 4410 and MRC 903 sputter machines.
Electron beam evaporations are performed in modified CHA vacuum systems. All systems are cryopumped and housed in a Class 1000 clean room.

Our deposition chambers accommodate substrates of various shapes and sizes. Substrates can be up to 12 inches square depending upon the system and material combination.

We are able to offer surface acoustic wave (SAW) device fabrication on piezoelectric materials such as quartz or lithium niobate. Ultrasound is one of our specialties with over 30 years experience with SAW devices and bulk piezoelectric materials such as PZT.

Film properties are measured using a stylus profiler for film thickness, four-point probe for sheet resistance, and a film stress measurement system for 3" or 100mm diameter wafers.

Our extensive materials and processing experience can be called upon
to decide the best solution to your thin film needs.



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