LGA
THIN FILMS
VACUUM
DEPOSITION SPECIALISTS
3064 Lawrence Expressway, Santa Clara, CA 95051
(408)733-3076 info@lgathinfilms.com
Processes/Services
Brochure
EVAPORATION
Vacuum evaporation is the process of heating up a material in vacuum until it gets to the point of vaporizing at a rate suitable for film deposition. This temperature can range from far below room temperature to over 3000° Celsius depending upon the material. There is a lower practical limitation in the range of 750° Celsius to prevent contamination from one deposition process to the next.
MATERIALS INVENTORY - Deposition materials presently in our inventory, or which we are able to produce by reactive processes, include the following:
Evaporated Films Conductive metals Al, Au, Ag, Cu Adhesion metals Cr, Ti Refractory metals Mo, W Platinum group metals Pt, Pd, Ir, Ru Magnetic metals Ni, Fe, Co Non-Magnetic alloy Ni-20%Cr Soft metals In, Sn Semiconductors Si, Ge Oxides SiO2, Al2O3, TiO2, HfO2
Ta2O5, Y2O3, In2O3, SnO2
Ga2O3, SiO, MgO, CeO2TCO ITO Fluorides CaF2, MgF2, BaF2, LaF3, YF3 New materials may be added upon request.
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LGA Thin Films®, Inc. All Rights Reserved.